Purpose :

Applicable :

Throughput(UPH) :

Chamber Type :

Load / Unload :

Chuck :

Equipment Control :

Process Feature

This equipment can do thin film coating process

8” Wafer PR spray coating

45 pcs (depend on film thickness)

Single wafer ultrasonic spray coating process chamber

2 sets ,open cassette type

Vacuum chuck with heat disk

Touch type IPC + PLC Control

·Wide range of flow rates – 1µl/min to 25ml/min
·High accuracy dispense ±0.5%
·Continuous flow capability
·Up to 80% reduction in material consumption
·Uniformity of film thickness is within ±10%
·Liquid can be atomization with viscosity less than 50cp
·Ultrasonic driver power levels are generally under 15 watts